Positioning system for components of optical systems

ABSTRACT

A positioning system for an optical system can include a support frame and a flexure arrangement. The flexure arrangement can be configured to secure an optical-system component relative to a support frame, with the optical-system component in a first orientation. The flexure arrangement can be configured to resiliently deform, upon application of a transient stress to the optical system, to move the optical-system component relative to the support frame along at least one degree of freedom. The flexure arrangement can be configured to return the optical-system component to the first orientation upon removal of the transient stress.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/536,988, filed Aug. 9, 2019, which claims priority to U.S.Provisional Patent Application No. 62/716,766, filed on Aug. 9, 2018,the entireties of which are incorporated herein by reference.

STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

Not applicable.

BACKGROUND OF THE TECHNOLOGY

The present technology relates to structural supports for opticalsystems, including structural arrangements for reproducibly and stablypositioning a component of an optical system, such as an imaging sensoror a projection target.

Precision optical systems of various types can be useful in a variety ofcontexts. For example, three dimensional (“3D”) imaging systems can beused in a variety of manufacturing and other settings. In some cases,machine vision systems such as 3D imaging systems can be configured toallow products to be accurately and quickly scanned for 3D information,which can be useful for shipping optimization and other tasks. However,optical systems, including 3D imaging systems with single or multiplecameras, can be difficult to deploy due to strict stability requirementsand other factors. For example, accurate measurement with some systemsmay require a high degree of positional stability despite fluctuatingenvironmental factors that can include changes in temperature,vibration, etc.

Environmental factors can be detrimental to the accuracy of machinevison systems in different ways. For example, in some cases thermal (orother) transients can cause components of an imaging system (e.g.,imaging sensors) to shift away from a calibrated position, resulting inpoor execution of processing tasks that are based on the calibratedposition. Further, even when transient stresses are removed, lack ofrepeatability in relaxation of a system can be problematic.

Due to the precision of certain systems, shifts on the order of micronsor hundreds of nanometers can significantly affect measurement accuracy.For example, some systems may have pixel sizes on the order of micronsyet may be expected to perform with sub-pixel accuracy. In someinstances, this can be particularly problematic with single-cameravision systems.

SUMMARY OF THE TECHNOLOGY

Some embodiments of the technology provide a positioning system for anoptical system that includes an optical-system component configured aspart of a projection or imaging system. The positioning system caninclude a support frame and a flexure arrangement configured to securethe optical-system component relative to the support frame with theoptical-system component in a first orientation. The flexure arrangementcan be configured to resiliently deform, upon application of a transientstress to the optical system, to move the optical-system componentrelative to the support frame along at least one degree of freedom. Theflexure arrangement can also be configured to return the optical-systemcomponent to the first orientation upon removal of the transient stress.

In some embodiments, one or more other features can be included for thenoted positioning system. The flexure arrangement can be integrallyformed with the support frame. The flexure arrangement can be integrallyformed with the optical-system component. The optical-system componentcan include a printed circuit board to support an imaging sensor. Theflexure arrangement can be integrally formed with the printed circuitboard.

The flexure arrangement includes a single flexure arm and a fixedconstraint. The optical-system component can be secured to each of thesingle flexure arm and the fixed constraint with a respective threadedfastener. The optical system can define an optical axis, wherein areference line between the fixed constraint and an attachment point ofthe single flexure arm to the optical-system component passes throughthe optical axis. The at least one degree of freedom provided by theflexure arrangement can be aligned for substantially linear translationof the optical-system component away from the fixed constraint.

The flexure arrangement can include a plurality of flexure arms. A firstflexure arm of the flexure arrangement can extend from the support framein a first direction. A second flexure arm of the flexure arrangementcan extend from the support frame in a second direction that issubstantially perpendicular to the first direction. A third flexure armof the flexure arrangement can extend from the support frame in thesecond direction, the third flexure arm being spaced apart from thesecond flexure arm in the first direction. The first flexure arm canextend from a first portion of the support frame, and the second andthird flexure arms can extend from a second portion of the support framethat extends substantially perpendicularly to the first portion of thesupport frame. The optical system can define an optical axis, whereineach of the second and third flexure arms is secured to theoptical-system component at a respective attachment point, and theattachment points of the second and third flexure arms can be disposedon a first reference line that extends through the optical axis. Thefirst flexure arm can be secured to the optical-system component at anfirst-flexure attachment point, and the first-flexure attachment pointcan be disposed on a second reference line that is substantiallyperpendicular to the first flexure arm and extends through the opticalaxis.

The flexure arms can be configured to provide degrees of freedom fortranslation and rotation within a focal plane of the optical system.Each of the flexure arms includes a first bending portion proximate thesupport frame and a second bending portion proximate a free end of theflexure arm, the first and second bending portions having a lowerstiffness than adjacent portions of the respective flexure arm. Each ofthe first and second bending portions of each of the flexure arms can beconfigured as a neck on the respective flexure arm.

The optical-system component can be a first component and the opticalsystem can include a second component, the flexure arrangement can be afirst flexure arrangement, and the positioning system can furtherinclude a second flexure arrangement configured to secure the secondcomponent to the support frame in a second orientation, at a differentlocation than the first component. The second flexure arrangement can beconfigured to resiliently deform, upon application of the transientstress to the optical system, to move the second component relative tothe support frame along at least one degree of freedom, and the secondflexure arrangement can be configured to return the second component tothe second orientation upon removal of the transient stress. Each of thefirst and second flexure arrangements can include one of: a respectivesingle flexure arm and a respective fixed constraint; or a respectiveplurality of flexure arms. The first flexure arrangement can include aplurality of flexure arms and the second flexure arrangement can includea single flexure arm and a fixed constraint.

The optical system can include a third component, and the positioningsystem can include a third flexure arrangement configured to secure thethird component to the support frame in a third orientation, between thefirst and second components. The third flexure arrangement can beconfigured to resiliently deform, upon application of the transientstress to the optical system, to move the third component relative tothe support frame along at least one degree of freedom. The thirdflexure arrangement can be configured to return the third component tothe third orientation upon removal of the transient stress.

The first component can be a projection system, the second component canbe a first imaging system, and the third component can be a secondimaging system, wherein the first flexure arrangement includes aplurality of flexure arms. Each of the second and third flexurearrangements can include, respectively, a single flexure arm and a fixedconstraint. The flexure arrangement can be secured to the optical-systemcomponent with an adhesive.

Some embodiments of the technology provide an optical system that caninclude a support frame, an optical component, and a flexure arrangementthat secures the optical component the support frame with the opticalcomponent in a first orientation. The flexure arrangement can beconfigured to resiliently deform relative to at least one degree offreedom, upon application of a transient stress to the optical system,to move the optical component relative to the support frame. The flexurearrangement can also be configured to return the optical component tothe first orientation upon removal of the transient stress.

In some embodiments, one or more other features can be included for thenoted optical system. The flexure arrangement can be integrally formedwith one of the support frame or the optical component. The opticalcomponent can include a printed circuit board to support an imagingsensor. The flexure arrangement is integrally formed with the printedcircuit board. The flexure arrangement can include a single flexure armand a fixed constraint.

The optical system can further include a lens arrangement that definesan optical axis, wherein a reference line between the fixed constraintand an attachment point of the single flexure arm to the opticalcomponent passes through the optical axis. At least one degree offreedom provided by the flexure arrangement can be aligned forsubstantially linear translation of the optical component away from thefixed constraint.

The flexure arrangement includes a plurality of flexure arms. A firstflexure arm of the flexure arrangement can extend from the support framein a first direction, and a second flexure arm of the flexurearrangement can extend from the support frame in a second direction thatis substantially perpendicular to the first direction. A third flexurearm of the flexure arrangement can extend from the support frame in thesecond direction, the third flexure arm being spaced apart from thesecond flexure arm in the first direction. The first flexure arm canextend from a first portion of the support frame, and the second andthird flexure arms can extend from a second portion of the support framethat extends substantially perpendicularly to the first portion of thesupport frame.

The optical system can further include a lens arrangement that definesan optical axis. Each of a first flexure arm and a second flexure arm ofthe plurality of flexure arms can be secured to the optical component ata respective attachment point, and the attachment points of the firstand second flexure arms can be disposed on a first reference line thatextends through the optical axis. An attachment point at which a thirdflexure arm of the plurality of flexure arms is secured to the opticalcomponent can be disposed on a second reference line that issubstantially perpendicular to the first reference line and extendsthrough the optical axis.

The flexure arms can be configured to provide at least two degrees offreedom for movement within a focal plane of the optical system. Each ofthe flexure arms can include a first bending portion and a secondbending portion, the first and second bending portions having a lowerstiffness than adjacent portions of the respective flexure arm. For eachof the flexure arms, the first bending portion can be configured as afirst neck proximate the support frame and the second bending portioncan be configured as a second neck proximate a free end of the flexurearm.

The optical component can be a first optical component and the flexurearrangement can be a first flexure arrangement, and the optical systemcan further include a second optical component and a second flexurearrangement that secures the second optical component to the supportframe at a different location than the first optical component, with thesecond optical component in a second orientation. The second flexurearrangement can be configured to resiliently deform, upon application ofthe transient stress to the optical system, to move the second opticalcomponent relative to the support frame along at least one degree offreedom. The second flexure arrangement can be configured to return thesecond optical component to the second orientation upon removal of thetransient stress.

Each of the first and second flexure arrangements can include arespective one of: a respective single flexure arm and a respectivefixed constraint; or a respective plurality of flexure arms. The firstflexure arrangement can include a plurality of flexure arms and thesecond flexure arrangement can include a single flexure arm and a fixedconstraint.

The optical system can include a third optical component and a thirdflexure arrangement that secures the third optical component to thesupport frame between the first and second optical components, with thethird optical component in a third orientation. The third flexurearrangement can be configured to resiliently deform, upon application ofthe transient stress to the optical system, to move the third opticalcomponent relative to the support frame along at least one degree offreedom. The third flexure arrangement can be configured to return thethird optical component to the third orientation upon removal of thetransient stress. The first optical component can be a projectionsystem, the second optical component can be a first imaging system, andthe third optical component can be a second imaging system. The firstflexure arrangement can include a plurality of flexure arms and each ofthe second and third flexure arrangements can include, respectively, asingle flexure arm and a fixed constraint. The first and third opticalcomponents can be calibrated for cooperative use, in the first and thirdorientations, respectively, in a three-dimensional dimensioning system.

Some embodiments of the technology provide a positioning system for athree-dimensional (3D) measurement system that includes a projectionsystem with a projection target and a projector that defines a projectorfocal plane, and an imaging system with an imaging sensor and a lensarrangement that defines an imaging focal plane, the imaging systembeing configured to interoperate with the projection system to execute3D measurements. The positioning system can include a support frame, afirst flexure arrangement, and a second flexure arrangement. The firstflexure arrangement can be configured to secure the projection targetrelative to the support frame, the first flexure arrangement including aplurality of flexures that permit two-dimensional (2D) movement of theprojection target within the projector focal plane and that preventmovement of the projection target out of the projector focal plane, inresponse to transient stresses on the 3D measurement system. The secondflexure arrangement can be spaced apart from the first flexurearrangement along the support frame, and can include a fixed constraintand a single flexure arm that direct movement of the imaging sensorsubstantially along a single movement dimension within the imaging focalplane and that prevent movement of the imaging sensor out of the imagingfocal plane, in response to transient stresses on the 3D measurementsystem.

In some embodiments, one or more other features can be included for thenoted positioning system for a 3D measurement system. At least one ofthe first flexure arrangement or the single flexure arm can beintegrally formed with the support frame. The imaging system can bespaced apart from the projection target in a first direction and withoptical axes of the projection system and the imaging system beingobliquely oriented relative to each other, wherein the single movementdimension is substantially perpendicular to the first direction.

One or more of the flexures of the first flexure arrangement can berigidly and non-rotatably secured to projection target. The one or moreof the flexures can be secured to the projection target with adhesive.The one or more of the flexures can be rigidly and non-rotatably securedto a glass substrate of the projection target. The imaging sensor can besecured with threaded fasteners to the single flexure arm and at thefixed constraint.

The imaging system can define an optical axis, and a reference line,between the fixed constraint and an attachment point of the singleflexure arm to the imaging sensor, can pass through the optical axis.The reference line can coincide with the single movement dimension.

The first flexure arrangement can include: a first flexure arm of thefirst flexure arrangement that extends from the support frame in a firstdirection; and a second flexure arm of the first flexure arrangementthat extends from the support frame in a second direction that issubstantially perpendicular to the first direction. A third flexure armof the first flexure arrangement can extend from the support frame inthe second direction, the third flexure arm being spaced apart from thesecond flexure arm in the first direction. The first flexure arm canextend from a first portion of the support frame, and the second andthird flexure arms can extend from a second portion of the support framethat extends substantially perpendicularly to the first portion of thesupport frame. Each of the flexures of the first flexure arrangement caninclude a notch that provides a locating feature for the projectiontarget.

The projection system can define an optical axis, and each of at leasttwo flexure arms of the plurality of flexures of the first flexurearrangement can be secured to the projection target at a respectiveattachment point. Each of the attachment points can be disposed on afirst reference line that extends perpendicularly to the optical axiswithin the projector focal plane. An additional flexure arm included inthe plurality of flexures of the first flexure arrangement can besecured to the projection target at an attachment point that is disposedon a second reference line that is substantially perpendicular to thefirst reference line and extends through the optical axis within theprojector focal plane. At least one of the first reference line or thesecond reference line can be a centerline of the projection target.

The imaging system can be a first imaging system, the 3D measurementsystem can further include a second imaging system with a second imagingsensor and a second lens arrangement that defines a second imaging focalplane, and the positioning system can further include a third flexurearrangement, disposed between the first and second flexure arrangementsalong the support frame. The third flexure arrangement can include asecond fixed constraint and a second single flexure arm that directmovement of the second imaging sensor substantially along a secondsingle movement dimension within the imaging focal plane and thatprevent movement of the second imaging sensor out of the second imagingfocal plane, in response to transient stresses on the 3D measurementsystem.

Some embodiments of the technology can provide a positioning system foran optical system that includes an optical-system component that formspart of a projection or imaging system. The positioning system caninclude a support frame and a flexure arrangement configured to securethe optical-system component relative to the support frame with theoptical-system component in a first orientation, to resiliently deform,upon application of a transient stress to the optical system, to movethe optical-system component relative to the support frame along atleast one degree of freedom, and to return the optical-system componentto the first orientation upon removal of the transient stress. Theflexure arrangement can include first and second flexure arms extendingin parallel with each other, from respective first and second anchorpoints at the support frame to respective first and second attachmentpoints at the optical-system component. A third flexure arm can extendperpendicularly to the first and second flexure arms, from a thirdanchor point at the support frame to a third attachment point at theoptical-system component. The first and second attachment points can bealigned on a first centerline of the optical-system component. The thirdattachment point can be aligned on a second centerline of theoptical-system component.

In some embodiments, one or more additional features can be included forthe note positioning system. The first and second centerlines canintersect at an optical axis of the optical system. The first, second,and third flexure arms can be rigidly and non-rotatably secured to theoptical-system component.

Some embodiments of the technology can provide a positioning system foran optical system that includes an optical-system component that formspart of a projection or imaging system. The positioning system caninclude a support frame and a flexure arrangement. The flexurearrangement can be configured to secure the optical-system componentrelative to the support frame with the optical-system component in afirst orientation, to resiliently deform, upon application of atransient stress to the optical system, to move the optical-systemcomponent relative to the support frame along at least one degree offreedom, and to return the optical-system component to the firstorientation upon removal of the transient stress. The flexurearrangement can include: a single flexure arm secured to theoptical-system component at a first attachment point; and a single rigidconstraint that secures the optical-system component to the supportframe. A reference line that extends between the first attachment pointand the single rigid constraint extends through an optical axis of theoptical system.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 shows a front elevation view of an optical system, according toone embodiment of the technology.

FIG. 2 shows an isometric view of the optical system of FIG. 1, withcertain components rendered transparently.

FIG. 3 shows a top plan view of the optical system of FIG. 1, withcertain components removed.

FIG. 4 shows a bottom cross-sectional view of the optical system of FIG.1.

FIG. 5 shows an enlarged top plan partial view of a projection system ofthe optical system of FIG. 1.

FIG. 6 shows an enlarged top plan partial view of an imaging system ofthe optical system of FIG. 1.

FIGS. 7 and 8 show isometric views of an optical system according toanother embodiment of the technology, with certain components removedfrom view in FIG. 8.

FIG. 9 shows a rear elevation view of the optical system of FIGS. 7 and8, with certain components removed from view.

DETAILED DESCRIPTION OF THE TECHNOLOGY

In the following detailed description, reference is made to theaccompanying drawings that form a part hereof. In the drawings, similarsymbols typically identify similar components, unless context dictatesotherwise. The example embodiments described in the detaileddescription, drawings, and claims are not meant to be limiting. Otherembodiments may be utilized, and other changes may be made, withoutdeparting from the spirit or scope of the subject matter presentedherein. It will be readily understood that the aspects of the presentdisclosure, as generally described herein, and illustrated in theFigures, can be arranged, substituted, combined, separated, and designedin a wide variety of different configurations, all of which areexplicitly contemplated herein.

As used herein, unless otherwise specified or limited otherwise, theterms “mounted,” “connected,” “supported,” and “coupled” and variationsthereof are used broadly and encompass both direct and indirectmountings, connections, supports, and couplings. Likewise, “connected”and “coupled” are not restricted to physical or mechanical connectionsor couplings.

Also as used herein, unless otherwise specified or limited, a “fixedconstraint” refers to a mechanical connection between two objects thatsubstantially constrains relative movement of the objects along alldegrees of freedom.

As also noted above, improved control of the orientation of componentsof optical systems, including 3D imaging systems, can contribute toimproved accuracy in imaging and associated operations, includingcalculation of 3D measurements. Accordingly, some conventionalapproaches attempt to secure sensors relatively rigidly. For example,some conventional approaches use threaded fasteners (e.g., screws) toattach imaging components, such as sensors, printed circuit boards(“PCBs”), or other substrates, to rigid structural supports. While thisapproach can be useful in some implementations, it can sometimes resultin substantial errors. For example, use of multiple fixed constraintscan sometimes over-constrain the relevant components, which can lead toirreversible buckling or other deformation. Further, upon application oftransient stresses, the components can slip or otherwise displacerelative to the support structure, including at the fasteners. Further,hysteresis during return of the overall system, once the transientstresses have been removed, can result in persistent errors in thelocation of the sensors and associated deficiencies in measurement (orother) operations.

Embodiments of the technology can address the issues above, or others,in various ways. For example, in some embodiments, one or more flexurearms can be disposed to support a PCB or other substrate relative tocomponents of a larger optical system. As stresses are applied to theoptical system, such as by thermal transients or other transientstresses, the flexure arm(s) can allow the PCB or other substrate tomove from a starting (e.g., calibrated) orientation to a second, loadedorientation. Usefully, in some arrangements, the movement to the second,loaded orientation can proceed along particular degrees of freedom in apredictable and repeatable way, due to the configuration of the flexurearm(s) and the associated connection(s) to the PCB or other substrate.Further, in some arrangements, when the transient stresses have beenremoved, the flexure arm(s) can cause the PCB or other substrate torepeatably and reliably return to the starting calibrated positon.

In some configurations, embodiments of the technology can be used in 3Ddimensioning systems, such as stereo-imaging or structured-light 3Dsystems. In some embodiments, for example, flexure arrangements can beused with imaging systems of a number, N, of imaging sensors that arearranged to cooperatively perform measurements along 2*N dimensions ofthe same object or phenomena. For example, in some embodiments, at leasttwo imaging devices with associated imaging sensors can be arranged in astereo configuration to measure 3D aspects of a target along twodimensions of imaging sensors. As another example, in some embodiments,an optical system can include a calibrated structured-light system tomeasure 3D aspects of a target, with a two-dimensional (“2D”) patternprojector and an associated 2D imaging device. In some embodiments,these imaging sensors and components of such structure-light systems canbe supported by flexure arrangements, including as expressly detailedbelow.

In some embodiments, such as in a structured light 3D system (e.g., asdescribed above), an optical system can measure 3D aspects of an objector space by measuring one dimension on an imaging sensor and twodimensions on a projected pattern. As such, a second dimension on theimaging sensor may be left as a largely unused fourth dimension ofmeasurement. In some embodiments, a flexure arrangement can beconfigured to appropriately support and constrain such a system, toallow for predictable translation of the imaging sensor, under transientstresses, along one dimension in particular—e.g., the unused fourthdimension. In this way, for example, because movement of the imagingsensor under transient stresses can be channeled to occur primarilyalong a less critical (e.g., unused) dimension, the movement may resultin relatively small overall imaging error. In some embodiments, similarconfigurations can also be implemented for stereo-imaging systems or forother optical systems.

In some embodiments, an optical system can include one or more separateimaging or projection systems, one or more of which can be supported bya flexure arrangement. In some embodiments, an imaging sensor can beconfigured to capture imaging information, or a projection system can beconfigured to project structured light patterns, on, at, or near anoptical axis determined by an associated lens arrangement. In someembodiments, the relevant optical axis can be perpendicular to a surfaceof the projector or of the camera.

In some embodiments, an optical system can include hardware and softwareconfigured to assist in capturing and processing imaging information.For example, a processor device such as a special or general purpose afield programmable gate array, or other similar device, and anassociated memory and input/output architecture, can be configured tocontrol projection of structure light patterns, capture of appropriateimages, or analysis of acquired images using machine vision algorithms.Operation of such a processor device can be calibrated, for example,based on predictable expected movement of relevant imaging components(e.g., sensors or projectors) as controlled by appropriate flexurearrangements.

In some embodiments, an optical system can include a focal plane, alocation of which is determined by a lens arrangement and associatedmechanical components (e.g., a monolithic or other frame). In someembodiments, an imaging sensor or a projection target, such as achrome-on-glass slide can be configured to be aligned with an associatedfocal plan in a calibrated orientation. In some embodiments, an imagingsensor or a projection target can be flush with the focal plane in thecalibrated orientation. In some embodiments, a surface of an imagingsensor or projection target can be parallel to an associated focal planeand perpendicular to an associated optical axis.

In some embodiments, a component for imaging or projection, such as aprojection target or a PCB assembly configured for image capture (and,in some cases, image analysis), can be secured to a frame of an opticalimaging system by one or more constraints, at least one of which isconfigured as a flexure. In some embodiments, at least one of theconstraints can be configured as a fixed constraint. For example, afirst side of a PCB can be secured to a frame using an elongate flexurearm and a second side of the PCB can be secured to a frame at a fixedmounting point. In some configurations, mechanical fasteners, such ascounter-sunk screws, can be used to secure the component to the flexureor to the fixed constraint. Such an arrangement can be useful, forexample, in order to cause the relevant optical component to movepredictably, under a variety of transient stresses, mainly along asingle direction. In some embodiments, as also noted above, the flexurearrangement can be configured to cause the optical component to moveprimarily along only an unused direction, relative to relevant imagingoperations.

In some embodiments, a flexure arrangement can be formed from the samematerial as the component to be secured. For example, one or moreflexure arms can be integrally formed with a PCB that supports animaging sensor, or with another relevant component. This may be useful,for example, to allow the flexure arrangement and the PCB to haveidentical or near identical material properties, such as the samethermal expansion coefficient. Accordingly, for example, the PCB and theflexure arms can be expected to expand and retract in a relativelypredictable and similar manner.

In some embodiments, as also noted above, a relevant component, such asan imaging sensor, can be secured at a first side with a flexure and canbe secured at a second side with a fixed constraint. In someembodiments, a relevant component can be secured with a flexurearrangement that includes multiple flexures. For example, a PCB with animaging sensor or a glass slide with a chrome projection pattern can besecured using a set of three flexure arms, collectively configured toprovide appropriate constraint (and freedom of movement) of the PCB orthe slide.

In some embodiments, a flexure arm can individually constrain movementrelative to certain degrees of freedom, while providing relativelylittle resistance to movement relative to other degrees of freedom. Forexample, a flexure arm can be configured to allow movement of acomponent within a particular plane (e.g., a plane corresponding to arelevant focal plane), but substantially constrain translation orrotation along or about an axis perpendicular to the plane (e.g., arelevant optical axis). In some embodiments, a flexure arm can beconfigured to allow movement over two degrees of freedom within aparticular plane, such as a rotational degree of freedom and asubstantially translational degree of freedom.

Some embodiments of the technology can usefully allow a component, suchas an imaging sensor or a projection target, to predictably move uponapplication of an external stress on the component or on a largeroptical system. Further, once the external stress has been removed, therelevant flexure arrangement can allow the component to predictably andreproducibly return to its original position, before the stress wasapplied to the system. Accordingly, despite transient disturbances,calibrated alignment of particular components can be reliably preservedfor general operation. In different applications, external stressesapplied to an optical system can include, for example: thermalgradients, thermal cycling, mechanical vibrations, and changes ingravitational forces induced by changes in the orientation of theimaging system.

In some embodiments, a component can be secured to a relevant frame by aflexure arrangement with three mechanical links. For example, a PCB ofan imaging device or a projection target can be secured to a largerframe, in a calibrated alignment with a relevant focal plane, using aset of three elongate flexure arms. In some embodiments, three flexurearms can be integrally formed with a frame of an optical system and canbe secured to a component with adhesives, or otherwise, to restrain thecomponent within a relevant focal plane. In some embodiments, the threeflexure arms can be integrally formed as part of a component that is tobe secured relative to a larger optical system. For example, a set offlexure arms can be integrally formed with a PCB that supports animaging sensor within a focal plane.

In some embodiments, a flexure arrangement with three flexures, such asthree flexure arms, can provide reproducible positioning of a component,including relative to a relevant focal plane. For example, each flexurearm can individually restrict movement in certain respective degrees offreedom, while individually providing little resistance to movement inother degrees of freedom. In some embodiments, for example, upon onloading of the flexures by the stresses to the system a component canthereby predictably move from a first calibrated orientation to a secondorientation. Further, once the stresses have been removed, the flexurescan elastically, predictably, and reproducibly return to the firstcalibrated position. In some embodiments, fewer than three flexures canbe used to similar effect.

In some embodiments, a positioning system can be configured to providereproducible movement of a component over a particular temperaturerange. For example, some embodiments can include a flexure arrangementconfigured to provide reproducible positioning and stabilizing of systemcomponents, such as an imaging sensor, over an expected operatingtemperature range of the imaging sensor. Thus, for example, measurementaccuracy can be provided over the entire temperature range.

FIG. 1 illustrates an example optical system 50 according to oneembodiment of the technology. In the embodiment illustrated, the opticalsystem 50 is configured as a 3D measurement system. In some embodiments,as also discussed above, a 3D measurement system can include a pluralityof imaging systems or other optical systems, such as projection systems,that are separated from each other by a precise, calibrated distance andare configured to interoperate to allow execution of 3D measurementprocedures.

In some arrangements, a plurality of optical devices can include twoimaging devices that are configured to separately image a common target.The separate images can then be analyzed in concert to identify 3Daspects (e.g., bulk or local dimensions) of the target. In somearrangements, the plurality of optical devices can include a projectorto project light onto a target and an imaging device to acquire imagesof the target and the projected light. The acquired image can then beanalyzed, in view of known qualities of the projected light, to identify3D aspects of the target. In other embodiments, other configurations arepossible.

In the embodiment illustrated in FIG. 1, the optical system 50 includesa support frame that is configured as a unitary optical beam 52.Further, a projection system 100, an imaging system 200, and an imagingsystem 300 are collectively and individually supported by the opticalbeam. In different embodiments, different optical systems can be used.In the illustrated example in particular, the projection system 100includes a first lens arrangement 102, the imaging system 200 includes asecond lens arrangement 202, and the imaging system 300 includes a thirdlens arrangement 302. The first lens arrangement 102, the second lensarrangement 202, and the third lens arrangement 302 generally includeone or more lenses or other optical components that are configured tofocus or disperse light. In some embodiments, for example, the lensarrangements 102, 202, 302 can include a zoom lens in order to changethe focal point of an imaging field, or one or more shutters configuredto efficiently capture an image of an imaging field.

In some embodiments, one or more of the multiple lens arrangements in alarger assembly can be configured to define a focal plane that isslightly out of plane relative to a support plane defined by defined asupport frame of the system, or other geometrical reference plane. Forexample, in the embodiment illustrated, as arranged for 3D dimensioningoperations, the first lens arrangement 102 and the third lensarrangement 302 are tilted slightly towards each other, so that opticalaxes 102 a, 302 a of the lens arrangements 102, 302 intersect in animaging field (not shown). Accordingly, the relative angle between theoptical axes 102 a, 302 a and a lateral separation between the lensarrangements 102, 302 (or associated components of the projection system100 and the imaging system 300) can be used to determine 3D informationabout an imaged object or space.

In some embodiments, the projection system 100 can include a projector,the imaging system 200 can include a color based camera system, and theimaging system 300 can include a grayscale based camera. In this regard,for example, the projection system 100 and the imaging system 300 can beused cooperatively to determine 3D information about an imaged object orspace, and to thereby produce a grayscale 3D image based on the 3Dinformation. Data from images acquired by the imaging system 200, canthen be used to overlay color, texture, or other information over thegrayscale 3D image.

FIG. 2 through 4 show additional views of the optical system 50,illustrating certain internal and external components thereof, accordingto the illustrated embodiment of the technology. In FIG. 2, certaincomponents of the optical system 50 are illustrated transparently toillustrate relative arrangement of those components relative to others.In FIG. 3, certain aspects of the projection system 100 have been hiddenfrom view to more clearly show other aspects of the projection system100, including the orientation of a projection target (as also discussedbelow) relative to three flexure arms, and the orientation of imagingsensors of the imaging systems 200, 300 relative to respective flexurearrangements that include respective single flexure arms and fixedconstraints (as also discussed below).

In particular, FIG. 5 illustrates an enlarged top plan partial view ofaspects of the projection system 100. In the embodiment illustrated, theprojection system 100 is configured to project a light pattern onto atarget (not shown). Correspondingly, the projection system 100 generallyincludes an illumination device (not shown), such as a digital lightprocessing (“DLP”) device, a liquid crystal on silicon (“LCOS”) device,a liquid crystal display (“LCD”), device, or another type of projectiondevice, that is configured to emit light to be projected onto a target.As illustrated in FIG. 5 in particular (see also FIG. 2), the projectionsystem 100 further includes a projection target 110, which is mounted ona substrate 112 (see FIG. 2) such as a transparent glass slide. Theprojection target 110 is generally configured for use with the lensarrangement 102 (see FIG. 2) and the illumination device (not shown) toproject a structured pattern of light onto a target.

To ensure accurate operation, the projection system 100 can becalibrated before operational use, including with regard to alignment ofprojection target 110 with the lens arrangement 102. Appropriatelyalignment of the projection target 110 and the lens arrangement 102, asalso discussed above, can be important to reliable determination of 3Dinformation from captured images. Likewise, to ensure reliablemeasurements using the projection system 100, it may be important toensure that the projection system 100 responds predictably to impositionand removal of a variety of transient stresses. Correspondingly, it maybe useful to secure the projection target 110 relative to the frame sothat the projection target 110 reliably returns to a calibratedorientation despite application of different types of transientstresses. Among other approaches contemplated herein, the flexurearrangement illustrated in FIG. 5 can provide these, and other,benefits.

In the embodiment illustrated, for example, the projection target 110 issecured to the frame of the optical system 50 by way of the attachmentof flexure arms 104, 106, 108 to the substrate 112. As illustrated, theflexure arms 104, 106, 108 are configured to constrain the substrate 112(and the target 110) to movement within a focal plane defined by thelens arrangement 102 (see FIG. 2), and to repeatably return thesubstrate 112 to a home orientation in the absence of transientstresses. In this way, for example, any transient stresses on the largeroptical system can be channeled, by the flexure arms 104, 106, 108, intopermitted movement of the substrate 112 only within the focal plane ofthe lens arrangement 102 (i.e., as roughly corresponds to the anchorpoints at the free ends of the flexure arms 104, 106, 108), withmovement of the substrate 112 out of the focal plane being substantiallyprevented.

Accordingly, although transient stresses may sometimes unavoidablyresult in movement of the substrate 112, the substrate itself can bemaintained in an appropriate orientation to ensure accurate continueoperation of imaging operations (e.g., for dimensioning) that rely onthe projection system 100. In some arrangements, this may usefully allowfor reliable measurement of imaged objects along two dimensions of apattern that is projected by the projection system 100, in combinationwith measurement along a single dimension of an associated imagingdevice (e.g., within the imaging system 300, as also discussed below).Thus, because the flexure arms 104, 106, 108 help to ensure that theprojection target 110 remains within the focal plane of the projectionsystem 100, despite transient stresses, highly accurate 3D measurementsof the imaged objects can be obtained.

In the embodiment illustrated, the flexure arms 104, 106, 108 areintegrally formed from the frame of the optical system 50, althoughother configurations are possible. For example, the flexure arms in someembodiments may be integrally formed from a substrate of a relevantoptical system. A variety of individual structural designs for flexurearms are also available. As illustrated in FIGS. 3 and 4 in particular,for example, each of the flexure arms 104, 106, 108 exhibits asubstantially identical, constant cross-sectional profile through theframe, so that each of the flexure arms 104, 106, 108 may tend torespond similarly to similar relative stresses. In other embodiments,other configurations are possible.

Generally, a set of flexure arms can be configured in a variety of waysto allow and to constrain movement relative to particular degrees offreedom. In the embodiment illustrated, for example, the flexure arm 104extends from an anchored end 104 a at a first portion of the frame alongan elongate direction of the frame. In contrast, the flexure arms 106,108 extend from anchored ends 106 a, 108 a at a second portion of theframe that is substantially perpendicular to the first portion of theframe. The flexure arms 106, 108 are spaced apart from each other, butgenerally extend in a common (i.e., substantially parallel) directionthat is substantially perpendicular to the flexure arm 104. The flexurearms 104, 106, 108 can this vary from some conventional flexurearrangements in which each flexure arm extends from a distinct portionof a relevant support frame, and extends in a unique, respectivedirection from the support frame (e.g., an optical beam) to thesupported component (e.g., an imaging sensor or projection target). Theapproach embodied in the flexure arms 104, 106, 108 can improvemanufacturability and reduce production costs, while still providingsubstantial stability for imaging (and projection) operations.

In some embodiments, flexure arms can be configured to optimize abalance between stability and structural restraint, or various otherconsiderations. For example, it may be useful to dispose attachmentpoints of flexures close to relevant centerlines of an optical component(e.g., the projection target 110) to minimize or otherwise controldeflection of the component for a given transient stress or relative toa particular degree of freedom. It may also be useful to disperseattachment points of the flexures over a relatively large area, in orderto provide a high degree of stability. In this regard, for example, asillustrated in FIG. 5 in particular, an attachment point 104 b of theflexure arm 104, and attachment points 106 b, 108 b of the flexure arms106, 108 are disposed in alignment with an associated one of centerlines112 a, 112 b of the substrate 112 and the projection target 110 (seeFIGS. 3 and 5), while also being spaced over a relatively large area.Further, the centerline 112 a (or other reference line between flexureattachments) can be aligned perpendicularly to the optical axis 102 awithin the projector focal plane, as well as perpendicular to thecenterline 112 b. This configuration, for example, may usefully reduce(or otherwise control) deflection of a reference point on the projectiontarget 110 relative to the optical axis of the lens arrangement 102,while also providing a relatively high degree of stability. In otherembodiments, however, other configurations are possible.

In different embodiments, a flexure arrangement can be secured to arelevant component in different ways. For the illustrated embodiment ofthe projection system 100, for example, each of the attachment points104 b, 106 b, 108 b of the flexure arms 104, 106, 108 includes acircular aperture positioned at a fee end of the respective flexure arm104, 106, 108, opposite the respective portions of the frame to whichthe flexure arms 104, 106, 108 are attached (i.e., the anchored ends 104a, 106 a, 108 a), and in alignment with the associated centerline (asalso discussed above). An adhesive material can be placed within theseapertures in order to assist in firmly securing the substrate 112 (andthe projection target 110) to the flexure arms 104, 106, 108. In somearrangements, this use of adhesive can allow for an appropriately securerigid and non-rotatable attachment of glass (or other materials) so thatthere is substantially no slip between the flexure arms 104, 106, 108and the substrate 112 (e.g. so that the a fixed constraint is providedbetween the attachment points 104 b, 106 b, 108 b and the substrate112). Similarly, because the anchored ends 104 a, 106 a, 108 a areintegrally formed with the surrounding structures of the optical beam52, there may be no slip between the flexure arms 104, 106, 108 and theoptical beam 52. In other embodiments, however, other configurations arepossible. Thus, in contrast to conventional solutions that employthreaded fasteners, the flexure arms 104, 106, 108 can be economicallyused with glass optical-system components while still providingappropriate movement control.

In the embodiment illustrated, the first flexure arm 104, the secondflexure arm 106, and the third flexure arm 108 can individuallyconstrain movement relative to certain respective degrees of freedom,while individually providing relatively little resistance to movementrelative to other degrees of freedom. For example, the first flexure arm104 can bend relatively easily within a plane defined by a surface onthe focal plane (or projection target 110), along a generally arcuatepath relative to the anchored end 104 a of the flexure arm 104. However,movement out of the focal plane (e.g., into or out of the page in FIG.5) as well as movement in parallel with the elongate direction offlexure arm 104 may be substantially restricted. Further, in someembodiments, the scale of relevant movements, as compared to theelongate length of the flexure arm 104, may result in the noted arcuatemovement being substantially linear. Thus, for example, the flexure arm104 can effectively allow movement of the substrate 112 essentiallylinearly along the centerline 112 b.

With regard to deflection, in the embodiment illustrated, the secondflexure arm 106 and the third flexure arm 108 function similarly to thefirst flexure arm 104. In particular, movement within the focal planealong respective arcuate paths may be generally allowed, while movementout of the focal plane may be substantially constrained. In particular,in the illustrated embodiment, the flexure arms 106, 108 can bendrelatively easily within a plane defined by a surface on the focal plane(or projection target 110), along a generally arcuate path relative tothe anchored end 106 a, 108 a of the flexure arms 106, 108. However,movement out of the focal plane (e.g., into or out of the page in FIG.5) as well as movement in parallel with the elongate direction offlexure arms 106, 108 may be substantially restricted. Further, in someembodiments, the scale of relevant movements, as compared to theelongate length of the flexure arms 106, 108, may result in the notedarcuate movement being substantially linear. Thus, for example, theflexure arms 106, 108 can effectively allow local movement of thesubstrate 112 essentially linearly along the centerline 112 a. Further,despite extending in a common direction, the lateral spacing of theflexure arms 106, 108 apart from each other along the direction of thecenterline 112 a can allow the noted movement without detrimentallyover-constraining the substrate 112, such as might otherwise result inunwanted deformation of the substrate 112.

As also noted above, movement of the flexure arms 104, 106, 108 can becaused by various stresses to the system including, for example,transient thermal gradients, thermal cycling, transient mechanicalforces (e.g., vibrations), and transient changes in gravitational forcesinduced by changes in the overall orientation of the imaging system.Usefully, for the illustrated configuration, once the transient stresseshave been removed, the flexures arms 104, 106, 108 resiliently andpredictably return the substrate 112 (and the projection target 110) toa known, calibrated position.

In some embodiments, including as illustrated, the flexure arms 104,106, 108 can be configured so that the expected transient stresses mayresult in a purely elastic deformation, such that the deformationremains in a linear portion of the relevant stress-strain curve and iscorrespondingly reversible. This can, for example, usefully allowpredicable and consistent return of the substrate 112 (and theprojection target 110) to a home position.

In some embodiments, the flexure arms 104, 106, 108 can also help toprevent unwanted deformation of the substrate 112, which could otherwisecause a deviation from an optical axis (e.g., a point within the plane).For example, in the embodiment illustrated, the elastic flexibility andselectively oriented constraints of the flexure arms 104, 106, 108 canallow for flexible and reversible absorption of transient stresseswithout deformation of the substrate 112 (e.g., via buckling out of thefocal plane).

In some embodiments, other features can be provided. For example, asshown in FIG. 2 in particular, notches 104 c, 106 c, 108 c in theflexure arms 104, 106, 108 can be configured as locating features forthe substrate 112, as well as to provide further stability for thesubstrate 112 as attached to the flexure arms 104, 106, 108.

In the embodiment illustrated, the flexure arms 104, 106, 108 are usedto secure the projection system 100. This configuration may beparticularly useful, for example, due to the ability to maintain theprojection target 110 within the optical plane of the lens arrangement102, so that the projection system 110 can facilitate accuratemeasurements in two dimensions. In some embodiments, however, a similarflexure arrangement can be beneficially used to secure an imagingsystem. In some embodiments, including as illustrated, a similar flexurearrangement can be used to secure an imaging or projection systemrelative to a different larger optical system.

As also noted above, in some embodiments, a flexure arrangement caninclude a single flexure (e.g., a single flexure arm) and a fully fixed,non-flexure constraint. For example, as illustrated in FIG. 6 inparticular, the imaging system 300 includes an imaging device configuredas an imaging sensor 310 mounted to a PCB 312 (see FIG. 2), which issecured to the frame via a flexure arrangement that includes a singleflexure arm 304 and a fixed constraint 308.

In different embodiments, the imaging system 300 can be configured indifferent ways. For example, imaging sensor 310 can be configured as a2D grayscale camera affixed to the PCB 312 and configured tointeroperate with the projection system 100 (see above) and a processordevice (not shown) for 3D dimensioning operations. Generally, theimaging sensor 310 can be configured as a complementary metal-oxidesemiconductor (“CMOS”) device, a charge coupled device (“CCD”), or otherknown device to register electronic signals based on photon incidence.

In some embodiments, as also noted above, an optical system can includemultiple imaging systems, such as the imaging systems 200, 300 of theoptical system 50. In the illustrated embodiments, the imaging systems200, 300 are similarly secured to the frame of the optical system 50,with a flexure arm 204 and a fixed constraint 208 (see FIG. 2) arrangedto secure the imaging system 200 similarly to the flexure arm 304 andthe fixed constraint 308 for the imaging system 300. Accordingly,discussion below relative to the flexure arm 304 and the fixedconstraint 308 can generally also apply to the flexure arm 204 and thefixed constraint 208.

Also as noted above, however, other aspects of the imaging system 200may vary from those of the imaging system 300. For example, the imagingsystem 200 can be configured as a color imaging system that isconfigured to capture details (e.g., texture) to overlay over 3Dinformation determined using the projection system 100 and the imagingsystem 300. In other embodiments, other configurations are possible.

FIG. 6 illustrates an enlarged view of the third imaging system 300. Asnoted above, the imaging systems 200, 300 generally include similarcomponents and generally function in a similar manner. Accordingly,similar considerations as discussed herein with regard to FIG. 6 mayalso apply to the imaging system 200 (see, e.g., FIG. 2).

As discussed above, the third imaging system 300 includes two mechanicallinks configured to secure the imaging sensor 310 (via the PCB 312 asshown in FIG. 2) to the frame of the optical system 50, with one linkconfigured as a fixed constraint and one link configured as a flexurethat includes the single flexure arm 304. In particular, in theembodiment illustrated, the fixed constraint 308 rigidly secures the PCB312 to the optical beam 52 of the optical system 50 (e.g., via acounter-sunk screw), with essentially zero degrees of freedom ofmovement. In contrast, the flexure arm 304 is rigidly secured to the PCB312 (e.g., also via a counter-sunk screw) in order to flexibly securethe PCB 312 to the frame of the optical system 50 to permit movement ofthe PCB 312 along at least one degree of freedom.

In the embodiment illustrated, the flexure arm 304 is integrally formedwith the frame of the optical system 50, and extends along the imagingsensor 310 generally opposite the location of the fixed constraint 308.To secure the flexure arm 304 to the PCB 312, a free end 304 a of theflexure arm 304 includes a connection device, opposite the connection ofthe flexure arm 304 to the frame. In the embodiment illustrated, theconnection device of the flexure arm 304 is configured as a circularaperture to receive a threaded fastener 306 (e.g., a counter-sunk screw)to secure the PCB 312 to the flexure arm 304.

In the embodiment illustrated, the connection device of the flexure arm304 (i.e., the circular aperture) is aligned with the fixed constraint308 along a reference line 310 a that extends across the imaging sensor310 substantially perpendicularly to an elongate direction of theflexure arm 304 and substantially perpendicularly to the separationdirection that extends between the imaging sensor 310 and the projectiontarget 110. In some embodiments, the reference line 310 a can coincidewith a permitted movement dimension for the imaging sensor 310 (i.e.,under the constraints of the flexure arm 304 and the fixed constraint).Further, the reference line 310 a can be configured to remain inalignment with the optical axis 302 a of the lens arrangement (seeFIG. 1) throughout operational deformation of the flexure arm 304.

This arrangement may be useful, for example, as also discussed below, toallow the PCB 312 to reversibly deform substantially along only a singlenon-critical dimension. For example, as also noted above, the imagingsystem 300 is configured to operate in conjunction with the projectionsystem 100 to support extraction of 3D information from a 2D image of anobject, with 3D measurements being effectively performed, via epipolartriangulation, along two dimensions defined by the projection system 100and one dimension defined by the imaging system 300. Notably, thecritical measurement dimension of the imaging sensor 310 issubstantially perpendicular to the reference line 310 a. And a centerpoint of the connection device of the single flexure arm 304 and acenter of the fixed constraint 308 are generally aligned, along a commonreference line, with the optical axis 302 a of the lens arrangement 302(see FIG. 1). Accordingly, the flexure arm 304 and the fixed constraint308 are configured to allow movement and deformation of the imagingsensor 310 along a dimension that is not critical to 3D measurements(i.e., in parallel with the reference line 310 a), while preventingmovement and deformation of the imaging sensor 310 along a dimensionthat is critical to 3D measurements (i.e., perpendicular to thereference line 310 a).

Thus, the illustrated arrangement can control deformation of the PCB 312under transient stresses to proceed along a direction that results inminimal disruption to ongoing imaging and analysis. Further, similarlyto the flexure arms 104, 106, 108, the flexure arm 304 may alsogenerally restrict movement of the imaging sensor 310 out of therelevant focal plane. Correspondingly, a highly accurate and robust 3Dmeasurement system can be obtained using the relatively low costsingle-flexure arrangement illustrated in FIG. 6 (i.e., using the fixedconstraint 308 and the single flexure arm 304).

In the embodiment illustrated, the fixed constraint 308 generallyconstrains movement relative to all degrees of freedom andcorrespondingly can provide a fixed reference point, as may be usefulduring calibration of the larger optical system 50. In contrast, thesingle flexure arm 304 individually restricts movement relative tocertain respective degrees of freedom, while individually providinglittle resistance to other degrees of freedom (e.g., as describedabove). Accordingly, in some implementations, the fixed constraint 308(or another point having fixed relationship thereto) can be definedduring calibration as an “origin” coordinate in all relevant dimensions.Also during calibration, the flexure arm 304 may be known to be in afirst calibrated orientation, which may correspond to a calibratedorientation of the PCB 312 and the imaging sensor 310. Machine vision(or other) operations can then be configured to execute based upon anassumption that the imaging sensor 310 is in the calibrated orientation.

Usefully, thereafter, as transient stresses are applied, the singleflexure arm 304 may move (e.g., bend) relative to the noted one degreeof freedom, within the plane defined by a surface of the imaging sensor310. Accordingly, the flexure arm 304 and the fixed constraint 308 canpermit the imaging sensor 310 to move predictably and repeatably withinthe focal plane of the lens arrangement 302, while movement out of thefocal plane may be substantially prevented. Further, as also notedabove, the movement of the imaging sensor 310 can be constrained to adimension (e.g., vertically from the perspective of FIG. 6, along theline 310 a) that may minimize disruption to image acquisition andprocessing. And, upon removal of the transient stresses, the flexure arm304 can predictably return the imaging system 300 to the known,calibrated orientation.

Thus, through the use of a combination of relatively low cost, partiallyintegrated flexure arrangements, the optical system 50 can provide forrelatively high accuracy 3D measurement (or other optical operations),including by channeling deformation and displacement, under transientstresses, to proceed solely along favorable degrees of freedom.Accordingly, the optical system 50 and, in particular, the flexure andoptical arrangements along the optical beam 52 can provide substantialimprovements over conventional systems.

FIG. 7 illustrates another optical system according to an embodiment ofthe technology, configured as an imager 700. In the embodimentillustrated, the imager 700 includes a PCB 702, a support structure 704,and a lens arrangement 706. Generally, the lens arrangement 706 caninclude one or more lenses configured to focus or disperse light, one ormore shutters configured to efficiently capture an image of an imagingfield, or other components, and can generally define an optical axisthat is configured to intersect an imaging sensor 708 (see FIG. 8) thatis affixed to a surface of the PCB 702 (e.g., via an adhesive orsoldering).

The imaging sensor 708 can be configured as any appropriate sensor, suchas a sensor of any of the types described above. In some embodiments, asimilar arrangement can be employed for a projection system, such as mayinclude a projection target similar to the projection target 110 (see,e.g., FIG. 5) in place of the PCB 702. In embodiments with a projectionsystem, an illumination source may also be included.

As illustrated in FIG. 8, for example, the support structure 704includes three integrally formed flexure arms 710, 712, 714 which arearranged to support the PCB 702. The flexure arm 710 extends from afirst portion of the support structure 704 in a first direction. Theflexure arms 712, 714 extend from a shared anchor point at a second,common portion of the support structure 704, with the flexure arm 714extending substantially in parallel with the flexure arm 710 and theflexure arm 712 extending substantially perpendicularly to both of theflexure arms 710, 714. The free ends of the flexure arms 710, 712, 714can be secured to the PCB 702 in various ways, including via adhesive orfastener connections. In some embodiments, the free ends of flexure arms710, 712, 714 can be rigidly and non-rotatably connected to the PCB 702using adhesive, rather than threaded fasteners or other similar devices.

As illustrated in particular in FIG. 9, each of the flexure arms 710,712, 714 exhibits certain portions of varying cross-section. Forexample, the flexure arm 710 includes an end neck portion 716 locatednear a free end of the flexure arm 710, and a base neck portion 718 thatconnects the flexure arm 710 to the first portion of the supportstructure 704. Each of the end neck portion 716 and the base neckportion 718 has a significantly decreased thickness compared to adjacentportions the flexure arm 710—and, in the embodiment illustrated, theremainder of the flexure arm 710 in general. Similarly, the flexure arms712, 714 include base neck portions 722, 726, respectively, located nearthe second portion of the support structure 704, and end neck portions720, 724, respectively, located near free ends of the flexure arms 712,714. As with the flexure arm 710, the neck portions 720, 722, 724, 726of the flexure arms 712, 714 have a significantly decreased thicknesscompared to adjacent (and other) portions of the flexure arms 712, 714.As also discussed below, this configuration can provide a usefulcombination of flexibility and stiffness for the flexure arms 710, 712,714 and the flexure arrangement generally.

In the embodiment illustrated, the neck portions 716 through 724 havesubstantially equal thicknesses and shapes. For example, as illustratedin FIG. 9, a general “u” shape cutout can extend into each side of therelevant flexure arm 710, 712, 714 at each of the neck portions 716through 724. In other embodiments, other configurations are possible.

Usefully, in the embodiment illustrated, the flexure arms 710, 712, 714can individually constrain movement relative to certain respectivedegrees of freedom, while individually providing little resistancerelative to other degrees of freedom. In this regard, for example, theflexure arms 710, 712, 714 can appropriately constrain the movement ofthe imaging sensor 708 (via the PCB 702), and ensure repeatable returnsto a calibrated orientation, without significantly over-constraining thelarger system.

For example, upon application of relevant stresses, the flexure arm 710can bend at the end neck portion 716 and the base neck portion 718within a plane defined by a surface on the optical sensor 708 (e.g., afocal plane of the lens arrangement 706). In particular, for theillustrated embodiment, the base neck potion 718 can bend to effectivelyallow translation of the optical sensor 708, due to the relatively smallscale of the expected deformation. In contrast, the end neck potion 716can bend to allow rotation of the optical sensor 708 relative to arotational center at the neck portion 716. However, movementperpendicular to the relevant focal plane (e.g., into or out of the pagein FIG. 9) is substantially constrained by the flexure arm 710, due tothe relatively large thickness of the arm in that direction (see, e.g.,FIG. 7). Likewise, movement in parallel with the elongate direction ofthe flexure arm 710 is also substantially constrained, as are othermovements (including rotations) not noted above.

Being similarly configured to the flexure arm 710, the flexure arms 712,714 can operate similarly to the flexure arm 710, but relative to theirown respective degrees of freedom, as defined by the particularorientations of the flexure arms 712, 714 and the neck portions 720through 726. Accordingly, in the embodiment illustrated, the flexurearms 710, 712, 714 can combine to generally allow predictable movementof the imaging sensor 708 (via the PCB 702) relative to six degrees offreedom, while generally maintaining the imaging sensor 708 in theappropriate optical (e.g., focal) plane.

As with other examples discussed herein, movement of the flexure arms710, 712, 714 from a first calibrated position to a second loadedposition can be generally caused by stresses to the system includingfrom: transient thermal gradients, thermal cycling, transient mechanicalvibrations, and changes in gravitational forces induced by transientshifting in the orientation of the imaging system. Once the stresseshave been removed, the flexure arms 710, 712, 714 can resiliently,predictably, and repeatably return the imaging sensor 708 to a known,calibrated position.

As with other arrangements discussed herein, in some embodiment,particular configuration of the flexure arms 710, 712, 714 and theattachment of the PCB 702 thereto can be selected in order to provideadditional benefits. For example, in some embodiments, the flexure arms710, 712, 714 can be secured to the PCB 702 in order to substantiallyminimize motion of a center of the imaging sensor 708 relative to anoptical axis of the lens arrangement 706.

In other embodiments, other configurations are possible. In someembodiments, for example, flexure arms similar to the flexure arms 710,712, 714 can be integrally formed with a PCB (e.g., the PCB 702), ratherthan as part of a support structure for the PCB.

In some embodiments, flexure arrangements according to the principlesherein can be used with other systems, including other optical metrologysystems. For example, embodiments of the technology, includingembodiments with a single flexure, can be used with laser triangulationsystems, stereo imaging systems, and other systems in which it may beuseful to limit deflection of a sensor (or other component) to aparticular direction. In this regard, for example, single-flexurearrangements such as the arrangement illustrated in FIG. 6 can berotated by 90 degrees (or otherwise) depending on the needs of aparticular system.

Thus, embodiments of the technology can provide improved positioningsystems for imaging and other components of optical systems. In someembodiments, for example, flexure arrangements can usefully constrainand permit movement relative to select degrees of freedom, in order toensure that changes to a system under transient stresses are minimal andpredictable, and to ensure that the system predictably and repeatablyreturns to a calibrated orientation once transient stresses are removed.

While the technology has been described with reference to exampleembodiments, it will be understood by those skilled in the art thatvarious changes may be made and equivalents may be substituted forelements thereof without departing from the scope of the technology. Inaddition, many modifications will be appreciated by those skilled in theart to adapt a particular instrument, situation or material to theteachings of the technology without departing from the essential scopethereof. Therefore, it is intended that the technology not be limited tothe particular embodiment disclosed as the best mode contemplated forcarrying out this technology, but that the technology will include allembodiments falling within the scope of the appended claims.

1-6. (canceled)
 7. A positioning system for a three-dimensional (3D)measurement system that includes a first optical component of a firstoptical system, and a second optical component of a second opticalsystem, the first optical system being configured to interoperate withthe second optical system to execute 3D measurements, the positioningsystem comprising: a support frame; a first flexure arrangementconfigured to secure the first optical component relative to the supportframe, the first flexure arrangement including a plurality of flexuresthat permit two-dimensional (2D) movement of the first optical componentwithin a first plane and that prevent movement of the first opticalcomponent out of the first plane, in response to transient stresses onthe 3D measurement system; and a second flexure arrangement, spacedapart from the first flexure arrangement along the support frame, thesecond flexure arrangement including a fixed constraint at which thesecond optical component is directly secured to the support frame and asingle flexure arm that is secured to the second optical componentopposite the fixed constraint, directs movement of the second opticalcomponent substantially along a single movement dimension within asecond plane, and prevents movement of the second optical component outof the second plane, in response to transient stresses on the 3Dmeasurement system.
 8. The positioning system of claim 7, wherein thefirst flexure arrangement and the second flexure arrangement areintegrally formed with the support frame.
 9. The positioning system ofclaim 7, wherein the plurality of flexures of the first flexurearrangement are rigidly and non-rotatably secured to the first opticalcomponent.
 10. The positioning system of claim 9, wherein each flexureof the plurality of flexures of the first flexure arrangement includes afree end with an aperture.
 11. The positioning system of claim 10,further comprising a substrate coupled to the first optical component,and wherein each free end of each flexure of the plurality of flexuresof the first flexure arrangement is coupled to the substrate, andwherein each aperture of each flexure of the plurality of flexures ofthe first flexure arrangement is configured to receive an adhesive tosecure the substrate to each flexure.
 12. The positioning system ofclaim 7, further comprising a substrate coupled to the first opticalcomponent, and wherein each flexure of the plurality of flexures of thefirst flexure arrangement are integrally formed with the substrate. 13.The positioning system of claim 7, wherein the first flexure arrangementincludes: a first flexure arm of the first flexure arrangement thatextends from the support frame in a first direction, the first flexurearm extending from a first portion of the support frame; a secondflexure arm of the first flexure arrangement that extends from thesupport frame in a second direction that is substantially perpendicularto the first direction; and a third flexure arm extending from thesupport frame in the second direction, the third flexure arm beingspaced apart from the second flexure arm in the first direction, thesecond and third flexure arms extending from a second portion of thesupport frame that extends substantially perpendicularly to the firstportion of the support frame.
 14. The positioning system of claim 7,wherein the second flexure arrangement includes: a first threadedfastener that secures the single flexure arm to the second opticalcomponent; and a second threaded fastener that directly secures thesupport frame to the second optical component at the fixed constraint,opposite the location of the first threaded fastener.
 15. Thepositioning system of claim 14, wherein a reference line is definedbetween the fixed constraint and an attachment point of the singleflexure arm to the second optical component, and wherein the referenceline coincides with the single movement dimension, and wherein thereference line is substantially perpendicular to an elongate directionof the single flexure arm.
 16. The positioning system of claim 7,wherein the first optical component is at least one of an imagingsensor, or a projection target.
 17. A positioning system for athree-dimensional (3D) measurement system that includes an imagingsystem with an optical component and a lens arrangement that defines afocal plane, the imaging system being configured to operate forexecution of 3D measurements, the positioning system comprising: asupport frame; a first flexure arrangement configured to secure theoptical component relative to the support frame, the first flexurearrangement including a plurality of flexures that permittwo-dimensional (2D) movement of the optical component within the focalplane and that prevent movement of the optical component out of thefocal plane, in response to transient stresses on the 3D measurementsystem, wherein the first flexure arrangement includes: a first flexurearm of the first flexure arrangement that extends from the support framein a first direction, the first flexure arm extending from a firstportion of the support frame; a second flexure arm of the first flexurearrangement that extends from the support frame in a second directionthat is substantially perpendicular to the first direction; and a thirdflexure arm extending from the support frame in the second direction,the third flexure arm being spaced apart from the second flexure arm inthe first direction, the second and third flexure arms extending from asecond portion of the support frame that extends substantiallyperpendicularly to the first portion of the support frame.
 18. Thepositioning system of claim 17, wherein the first flexure arm, thesecond flexure arm, and the third flexure arm are integrally formed withthe support frame.
 19. The positioning system of claim 17, wherein thefirst flexure arm is secured to the optical component at a firstattachment point, wherein the second flexure arm is secured to theoptical component at a second attachment point, wherein the thirdflexure arm is secured to the optical component at a third attachmentpoint, wherein the first attachment point is disposed on a firstreference line, and wherein the second and third attachment points aredisposed on a second reference line that is perpendicular to the firstreference line.
 20. The positioning system of claim 19, wherein at leastone of: the first reference line is a centerline of the opticalcomponent; or the second reference line is a centerline of the opticalcomponent.
 21. The positioning system of claim 17, wherein the opticalcomponent is a first optical component, and further comprising: a secondflexure arrangement, spaced apart from the first flexure arrangementalong the support frame, the second flexure arrangement being configuredto secure a second optical component relative to the support frame, thesecond flexure arrangement including: a first single flexure arm thatextends from the support frame to a free end that is coupled to a firstend of the second optical component; and a first fixed constraint, atwhich an opposite second end of the second optical component is fixeddirectly to the support frame; and a third flexure arrangement, spacedapart from the second flexure arrangement along the support frame sothat the second flexure arrangement is positioned between the first andthird flexure arrangements, the third flexure arrangement beingconfigured to secure a third optical component relative to the supportframe, the third flexure arrangement including: a second single flexurearm that extends from the support frame to a free end that is coupled toa first end of the third optical component; and a second fixedconstraint, at which an opposite second end of the third opticalcomponent is fixed directly to the support frame.
 22. The positioningsystem of claim 17, wherein the optical component is at least one of animaging sensor, or a projection target.
 23. A positioning system for athree-dimensional (3D) measurement system that includes an imagingsystem with an optical component and a lens arrangement that defines afocal plane, the imaging system being configured to operate forexecution of 3D measurements, the positioning system comprising: asupport frame; a first flexure arrangement configured to secure theoptical component relative to the support frame, the first flexurearrangement including a plurality of flexures that permittwo-dimensional (2D) movement of the optical component within the focalplane and that prevent movement of the optical component out of thefocal plane, in response to transient stresses on the 3D measurementsystem, wherein each of at least two flexure arms of the plurality offlexures of the first flexure arrangement is secured to the opticalcomponent at a respective attachment point, wherein each of theattachment points is disposed on a first reference line that extendsperpendicularly to an optical axis within the focal plane, and whereinan additional flexure arm included in the plurality of flexures of thefirst flexure arrangement is secured to the optical component at anattachment point that is disposed on a second reference line that issubstantially perpendicular to the first reference line and extendsthrough the optical axis within the focal plane.
 24. The positioningsystem of claim 23, wherein each flexure arm of the plurality offlexures is integrally formed with the support frame.
 25. Thepositioning system of claim 23, wherein each flexure arm of theplurality of flexures is rigidly and non-rotatably secured to theoptical component.
 26. The positioning system of claim 23, wherein theoptical component is a first optical component, and further comprising:a second flexure arrangement, spaced apart from the first flexurearrangement along the support frame, the second flexure arrangementbeing configured to secure a second optical component relative to thesupport frame, the second flexure arrangement including: a first singleflexure arm that extends from the support frame to a free end that iscoupled to a first end of the second optical component; and a firstfixed constraint, at which an opposite second end of the second opticalcomponent is fixed directly to the support frame; and a third flexurearrangement, spaced apart from the second flexure arrangement along thesupport frame so that the second flexure arrangement is positionedbetween the first and third flexure arrangements, the third flexurearrangement being configured to secure a third optical componentrelative to the support frame, the third flexure arrangement including:a second single flexure arm that extends from the support frame to afree end that is coupled to a first end of the third optical component;and a second fixed constraint, at which an opposite second end of thethird optical component is fixed directly to the support frame.
 27. Thepositioning system of claim 26, wherein the first optical component is aprojection target, the second optical component is a first imagingsensor, and the third optical component is a second imaging sensor. 28.The positioning system of claim 26, further comprising: a substratecoupled to the first optical component, each flexure arm beingintegrally formed with the substrate; a first printed circuit board(PCB) coupled to the second optical component, the first single flexurearm being integrally formed with the first PCB; and a second PCB coupledto the third optical component, the second single flexure arm beingintegrally formed with the second PCB.
 29. The positioning system ofclaim 23, further comprising a substrate coupled to the opticalcomponent, and to each flexure arm of the first flexure arrangement,wherein each flexure arm of the first flexure arrangement includes arespective notch, and wherein the substrate engages each flexure arm atthe respective notch to provide further stability for the substrate.